自主補償無線供電機制及彈性模組化諧振策略於 電漿電源系統整合應用與開發Integrated Application and Development of Flexible Modular Resonance Strategies and Self-Compensated Wireless Power Transfer Mechanism for Plasma Power

Abstract

This study proposes a plasma power system with integrated resonant driving circuit and modular power capacity expansion mechanism, which also uses the wireless power transfer technique asits power source. The research is advanced in view of the lack of capacity expansion capabilities and flexible resonant voltage gain adjustment mechanism in existing plasma-driven systems. As aforementioned, the applied field of plasma sputtering process is thus limited because of its cable. Hence, this study proposes a hybrid resonant tank, a feedback compensation circuit, and a plasma load to construct a new type of resonant driving circuit. This study can also flexibly adjust the voltage transfer gain of the system by regulating the operation frequency and resonance feedback method. In addition, this study adopts a single transformer and plasma impedance as a modular unit to complete the power capacity expansion through multi-module connection. The dual-loop primary coils which transfer power to enhance the applied flexibility of plasma power are achieved through the coaxial D-Pad plane induction coils asymmetric transfer mechanism. In the meantime, a self-compensated resonance strategy is achieved to stabilize the quality of inductive transfer power. In order to confirm the practicality of the proposed system, the hardware prototype can be used to check the compatibility of the resonant driving systems with the modular power capability expansion design. The contactless power transfer method can help improve the convenience and innovation of the plasma power system. Also, it comes with a high industrial potential for plasma application.