摘要
本文提出一套融入增強複合功率調節技術之整合型諧振驅動電路於電漿放電應用研究。此動機在於目前電漿驅動常採改變電流振幅調整功率，此方式造成低電流時致使電漿噴發品質與功率不穩定，且驅動電路無法補償電漿本體諧振特性，以及存在電路與控制設計複雜等問題。因此，本文研擬整合諧振電路與回授電路，並加入彈性諧振補償功能與線圈繞組回授偵測能力，以節省電流感測元件使用與提升系統轉換效益。此外，此研究再提出一套增強複合功率調節技術，其可同步調變電漿電流振幅與噴發時間寬度，達到高精密與線性化調整電漿操作功率，並改善低功率電漿噴發不穩定問題。經由模擬分析與硬體電路測試，實驗結果佐證此整合型電路確實兼具有效驅動電漿放電與功率操作線性化等功能，成果頗助電漿濺潑製程應用與設計參考。
關鍵詞：整合型諧振電路、電漿、回授電路、複合功率調變
Abstract
This paper proposes an integrated resonant driving circuit with an enhanced hybrid power modulation technique for plasma discharging application. The motivation of the research lies in the demerits of power regulation by adjusting current amplitude commonly in plasma driving. This conventional method causes the instability of plasma splashing quality and output capability under low current condition, the unsatisfactory compensation of plasma resonant characteristic by the driving circuit and the increasing complexity of circuit and control design. Consequently, this research aims to integrate the resonant circuit and the feedback circuit with both additional capability of flexible resonant compensation and the feedback detection of coil signals in order to reduce current sensing components and reinforce conversion behavior of the whole system. In addition, the enhanced hybrid power regulation technique is also proposed in this study featuring the synchronous modulation of plasma current amplitude and its erupting time interval. By means of the aforementioned technique, high accuracy and linearization adjustment of plasma operating power can be achieved while the low–power plasma eruption instability can therefore be improved. Through the simulation analysis and the hardware circuit testing, the experimental results validate the well performance including plasma discharging and power adjusting linearity of the presented integrated circuit. The researching achievements are deemed as beneficial references for the plasma splashing process application and design.
Keywords: Integrated Resonance Circuit, Plasma, Feedback Circuit, Hybrid Power Modulation